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Continue to ChatRepetitive control of an XYZ piezo-stage for faster nano-scanning: Numerical simulations and experiments - https://avesis.itu.edu.tr/yayin/3d6f4a21-5935-4f13-a2bb-c3100cfa047a/repetitive-control-of-an-xyz-piezo-stage-for-faster-nano-scanning-numerical-simulations-and-experiments